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A kind of technology of the mirror position determined in optical interdferometer


A kind of MEMS (micro electro mechanical system) (MEMS) interferometer system uses the position of capacitance sensing circuit determination moveable mirror.Electrostatic MEMS actuator to moveable mirror to cause its displacement.Capacitance sensing circuit senses the capacitance present of MEMS actuator and the position of the capacitance present determination moveable mirror based on MEMS actuator.


CN 2011800131093

united states
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current assignee: 
SI Ware Systems Inc
Status Date: 
March 23, 2016
SI Ware Systems Inc
worldwide applications: 
2015 . us us . 2026 . kr au ca wo es ep cn mx jp . 2017 . us us 2018 . il

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