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Integrated optical probe card and system for batch testing of optical MEMS structures with in-plane optical axis using micro-optical bench components


Aspects relate to an integrated optical probe card and a system for performing wafer testing of optical micro-electro-mechanical systems (MEMS) structures with an in-plane optical axis. On-wafer optical screening of optical MEMS structures may be performed utilizing one or more micro-optical bench components to redirect light between an out-of-plane direction that is perpendicular to the in-plane optical axis to an in-plane direction that is parallel to the in-plane optical axis to enable testing of the optical MEMS structures with vertical injection of the light.


US 20180143245

united states
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Bassam Saadany, Mostafa Medhat, Muhammad Nagi, Ahmed Shebl, Yasser M. Sabry, Bassem Mortada, Diaa Khalil
current assignee: 
SI Ware Systems SAE SI Ware Systems Inc
Status Date: 
September 22, 2020
SI Ware Systems SAE SI Ware Systems Inc
worldwide applications: 
2015 . us us . 2026 . kr au ca wo es ep cn mx jp . 2017 . us us 2018 . il

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