Book a Demo

Micro-optical bench device with highly-controlled optical surfaces


Microelectromechanical systems (MEMS) refers to the integration of mechanical elements, sensors, actuators, and electrons on a common silicon substrate by microfabrication technology. For example, microelectronics are typically manufactured using integrated circuit (IC) processes, while micro-mechanical components are selectively etched away from portions of silicon wafers or interconnected to add new structural layers. Manufactured using certain microfabrication processes to form mechanical and electromechanical components. Due to their low cost, batch processing capability, and compatibility with standard microelectronics, MEMS devices provide spectroscopy, profilometry, environmental sensing, refractometry (or texture perception), and some other It is an attractive candidate for use in sensor applications. Also, the small size of MEMS devices facilitates incorporating such MEMS devices into mobile and handheld devices.



united states
download pdf
current assignee: 
Si Ware Systems SI Ware Systems Inc
Status Date: 
February 12, 2020
Si Ware Systems SI Ware Systems Inc
worldwide applications: 
2015 . us us . 2026 . kr au ca wo es ep cn mx jp . 2017 . us us 2018 . il

Ready to Streamline analysis processes for your business ?

See NeoSpectra in action and learn how it can enhance your analysis workflows. Complete the form to request a demo and we’ll be glad to guide you through its unique features.

Contact us