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Micro-optical bench device with highly-controlled optical surfaces


Various aspects of the present disclosure provide a micro-optical bench device fabricated by a process that provides control over one or more properties of the micro-optical bench device and/or one or more properties of optical surfaces in the micro-optical bench device. The process includes etching a substrate to form a permanent structure including optical elements and a temporary structure. The shape of the temporary structure and gaps between the temporary structure and the permanent structure facilitate control of a property of the micro-optical bench and/or optical surfaces of optical elements therein. The property may include, for example, surface roughness, selective coating of surfaces, or inclination angles of the surfaces with respect to a plane of the substrate. The process further includes removing the temporary structure from an optical path of the micro-optical bench device. The present invention is directed to a method for fabricating a micro-optical bench device according to claim 1, and subsidiary aspect of the invention are provided in the dependent claims.



united states
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Bassam A. Saadany, Yasser M. SABRY, Mostafa Medhat, Bassem Mortada, Muhammed NAGI, Mohamed Sadek, Yasseen Nada, Khaled Hassan
current assignee: 
SI Ware Systems Inc
Status Date: 
July 19, 2023
SI Ware Systems Inc
worldwide applications: 
2015 . us us . 2026 . kr au ca wo es ep cn mx jp . 2017 . us us 2018 . il

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