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Optical MEMS interferometer based on space beam splitting


A kind of optical micro electro-mechanical systems (MEMS) interferometer based on space beam splitting includes the spatial beam separator for inputs light beam space to be beamed into two interferometer beams and the space bundling device for two interferometer beam spaces to be closed to beam.A kind of MEMS moveable mirrors are provided, for generating the optical path difference between the first interferometer beam and the second interferometer beam.


CN105051484 A

united states
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current assignee: 
SI Ware Systems Inc
Status Date: 
March 20, 2018
SI Ware Systems Inc
worldwide applications: 
2015 . us us . 2026 . kr au ca wo es ep cn mx jp . 2017 . us us 2018 . il

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