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Self calibration for mirror positioning in optical MEMS interferometers


A Micro-Electro-Mechanical System (MEMS) apparatus provides for self-calibration of mirror positioning of a moveable mirror of an interferometer. At least one mirror in the MEMS apparatus includes a non-planar surface. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS apparatus includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at multiple reference positions of the moveable mirror corresponding to a center burst and one or more secondary bursts of an interferogram produced by the interferometer based on the non-planar surface. A calibration module uses the actuator capacitances at the reference positions to compensate for any drift in the capacitive sensing circuit.



united states
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Momen Anwar, Mostafa Medhat, Bassem Mortada, Ahmed Othman El Shater, Mina Gad Seif, Muhammed Nagy, Bassam A. Saadany, Amr N. Hafez
current assignee: 
SI Ware Systems SAE SI Ware Systems Inc
Status Date: 
May 23, 2017
SI Ware Systems SAE SI Ware Systems Inc
worldwide applications: 
2015 . us us . 2026 . kr au ca wo es ep cn mx jp . 2017 . us us 2018 . il

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